Islam, A.; Anwar, Shahid; Anwar, Sharmistha
(61st Dae-Solid State Physics Symposium, 1832, 2017)
In this work, the pure nc-W2N and nc-W2N/a-Si3N4 nanocomposite films were deposited at 200 degrees C substrate temperature by magnetron sputtering. The effect of Si3N4 target power on microstructural and mechanical properties ...