Joy, RM; Pobedinskas, P; Baule, N; Bai, SY; Jannis, D; Gauquelin, N; Pinault-Thaury, MA; Jomard, F; Sankaran, KJ; Rouzbahani, R; Ll�ret, F; Desta, D; D'Haen, J; Verbeeck, J; Becker, MF; Haenen, K
(Acta Materialia, 264, 2024; 119548)
This study reports the impact of film microstructure and composition on the Young's modulus and residual stress in nanocrystalline diamond (NCD) thin films (approximate to 250 nm thick) grown on silicon substrates using a ...