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Diamond and diamond-like-carbon growth on Si (100) by hot filament-assisted RF plasma CVD

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dc.contributor.author Roul, B.K.
dc.contributor.author Nayak, B.B.
dc.contributor.author Mishra, Pratima Kumari
dc.contributor.author Mohanty, B.C.
dc.date.accessioned 2018-10-01T12:21:40Z
dc.date.available 2018-10-01T12:21:40Z
dc.date.issued 1999
dc.identifier.citation Journal Of Materials Synthesis And Processing, 7(5), 1999: 281-288
dc.identifier.issn 1064-7562
dc.identifier.uri http://ore.immt.res.in/handle/2018/799
dc.description.abstract Diamond and diamond-like carbon (DLC) crystallites can be grown on a Si (100) substrate by hot filament-assisted RF plasma CVD in a low-vacuum (2-Torr) environment from C2H2 without using hydrogen. The deposition was carried out at 900 degreesC onto the precleaned diamond polished Si (100) substrate. XRD and Raman spectra revealed the presence of diamond, graphite, lonsdaleite, and high-order polymeric hydrocarbon phases. The morphology observed by SEM shows typical habit and facets of the diamond crystallites grown on silicon. An attempt was made to explain some discrepancies observed in the XRD and Raman spectra of our multiphasic DLC films.
dc.language en
dc.publisher Consultants Bureau
dc.relation.isreferencedby SCI
dc.rights Copyright [1999]. All efforts have been made to respect the copyright to the best of our knowledge. Inadvertent omissions, if brought to our notice, stand for correction and withdrawal of document from this repository.
dc.subject Materials Sciences
dc.title Diamond and diamond-like-carbon growth on Si (100) by hot filament-assisted RF plasma CVD
dc.type Journal Article
dc.affiliation.author Inst Mat Sci, Bhubaneswar 751005, Orissa, India


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