Evaluating The Microstructure And Mechanical Performance Of Sputtered TiAlBN Nanocomposite Coating

Abstract

We report here the microstructural and mechanical properties of nanocrystalline (nc) Titanium Aluminium Nitride (TiAlN) embedded in nanocrystalline Boron Nitride (BN) nanocomposite films. The coatings were deposited on Si substrate using reactive magnetron co-sputtering by varying BN power. Coatings were characterized by using grazing incident X-ray diffraction (GIXRD), Raman spectroscopy, field emission scanning electron microscopy (FESEM), energy dispersive X-ray spectroscopy (EDS) and nanoindentation. GIXRD showed the formation of cubic Ti3AlN and hexagonal BN phase in the coating. Variation in structure and target power of BN influence the mechanical property of the coating. Mechanical property increases with power up to 100W, then decrease with further increase in power.